Illinois Tool Works Inc.
FLOW THROUGH PRESSURE SENSOR

Abstract:

A system for removing dead volume in a sensor assembly of a mass flow controller is presented. The system comprises a valve assembly communicable coupled to the sensor assembly. The valve assembly is in fluid communication with fluid in a primary flow path and the sensor assembly is in fluid communication with fluid in the primary flow path. The sensor assembly comprises a pressure transducer having a first reservoir and another pressure transducer having a second reservoir. The first reservoir has a port in fluid communication with fluid in a sampled flow path. The second reservoir is coupled to a second pressure transducer and is fluidly coupled to the first reservoir through a flow through path. The second reservoir also includes another port for communicating the flow of fluid from the flow through path to another flow path. A flow rate restrictor is disposed in the flow through path.