Illinois Tool Works Inc.
In-tool ESD events selective monitoring method and apparatus

Abstract:

An embodiment of the invention provides an apparatus for detecting electrostatic discharges (ESD) events, comprising: an ESD detector configured to determine at least one process window that will permit the ESD detector to detect an ESD event; at least one antenna coupled to said ESD detector; and said ESD detector calibrated for at least one discharge energy. Another embodiment of the invention provides: a method for detecting electrostatic discharges (ESD) events, comprising: determining at least one process window that will permit an ESD detector to detect an ESD event; and calibrating the ESD detector for at least one discharge energy.