Intevac, Inc.
METHOD TO PRODUCE HIGH DENSITY DIAMOND LIKE CARBON THIN FILMS

Abstract:

A method for forming a diamond-like carbon (DLC) coating on an article is provided, comprising: alternatingly performing a deposition process and an ashing process on the article a determined number of times, wherein during the deposition process the method proceeds by forming on the article a layer of DLC which includes graphitic sp.sup.2 carbon and tetrahedral sp.sup.3 carbon, and during the ashing process the method proceeds by selectively etching the graphitic sp.sup.2 carbon, wherein the determine number of time is configured to result in a designated overall thickness of the DLC coating.