Keysight Technologies, Inc.
Calibrating impedance measurement device

Abstract:

A method of calibrating an impedance measurement device for measuring DUT impedance includes performing short calibration measurements using a short calibration standard to obtain short raw data; performing first shunt calibration measurements using a first shunt calibration standard to obtain first raw data, the first shunt calibration standard having known first resistance and unknown first inductance; performing second shunt calibration measurements using a second shunt calibration standard to obtain second raw data, the second shunt calibration standard having known second resistance and unknown second inductance; determining first and second complex impedances of the first and second shunt calibration standards by calculating the first and second inductances using the short, first and second raw data applied to a specific error model; and determining general error coefficients for an error model using the first and second complex impedances and the first and second raw data applied to a one-port calibration procedure.