Keysight Technologies, Inc.
Semiconductor wafer test system

Abstract:

A wafer test system includes a cabinet housing multiple instruments, a test head having multiple pin modules, and cable connecting at least some of the instruments to the pin modules. The cabinet has at least one front door, left and right side panels, a rear door, a ceiling unit, and a bottom unit. Each of the instruments has a front surface, left and right side surfaces, and a rear surface. At least some of the instruments each include at least one first connection terminal. The cabinet further includes a first space defined between the at least one front door and the front surface of each of the instruments, and a second space defined between the rear door and the front surface of each of the instruments. The first space and the second space are separated in the cabinet to separate intake air and exhaust air of the instruments.