LG Display Co., Ltd.
THIN FILM TRANSISTOR ARRAY SUBSTRATE FOR DIGITAL X-RAY DETECTOR DEVICE AND DIGITAL X-RAY DETECTOR DEVICE AND MANUFACTURING METHOD THEREOF

Abstract:

A thin film transistor array substrate for a digital X-ray detector device includes a base substrate; a driving thin film transistor disposed over the base substrate; a PIN (P type semiconductor-Intrinsic type semiconductor-N type semiconductor) diode configured to be connected to the driving thin film transistor, the PIN diode including a lower electrode, a PIN layer, and an upper electrode; and at least one leakage current blocking layer configured to cover a side surface of the PIN layer and contact the PIN layer to thereby minimize generation of the leakage current of the PIN diode and improve characteristics such as detective quantum efficiency (DQE) and signal to noise ratio (SNR) and improving an image quality of the digital X-ray detector device.