LG Display Co., Ltd.
Roll-to-roll substrate deposition apparatus
Last updated:
Abstract:
Disclosed is a roll-to-roll substrate deposition apparatus which may control the width and length of a deposition area so as to adjust the size of a thin film. The roll-to-roll substrate deposition apparatus includes a deposition area controller disposed between a flexible substrate supplied to the inside of a chamber and a deposition unit supplying a deposition material to the flexible substrate so as to adjust the width and length of a thin film formed of the deposition material on one surface of the flexible substrate.
Status:
Grant
Type:
Utility
Filling date:
29 Nov 2017
Issue date:
22 Dec 2020