LG Display Co., Ltd.
Roll-to-roll substrate deposition apparatus

Last updated:

Abstract:

Disclosed is a roll-to-roll substrate deposition apparatus which may control the width and length of a deposition area so as to adjust the size of a thin film. The roll-to-roll substrate deposition apparatus includes a deposition area controller disposed between a flexible substrate supplied to the inside of a chamber and a deposition unit supplying a deposition material to the flexible substrate so as to adjust the width and length of a thin film formed of the deposition material on one surface of the flexible substrate.

Status:
Grant
Type:

Utility

Filling date:

29 Nov 2017

Issue date:

22 Dec 2020