Monolithic Power Systems, Inc.
LATERAL TRANSISTOR WITH LATERAL CONDUCTIVE FIELD PLATE OVER A FIELD PLATE POSITIONING LAYER

Abstract:

The present disclosure discloses a lateral transistor having a source region, a drain region, a gate near the source region side and a field dielectric positioned in or atop a portion of a well region between the drain region and the gate. The lateral transistor further includes a non-conductive field plate positioning layer positioned atop a portion of the field dielectric and separated laterally from the gate with a first lateral distance, a lateral conductive field plate positioned atop the non-conductive field plate positioning layer and separated laterally from the gate with a second lateral distance and a vertical trenched field plate contact extending vertically from a top surface of an interlayer dielectric layer through the interlayer dielectric layer to reach and contact with the lateral conductive field plate.