MACOM Technology Solutions Holdings, Inc.
HETEROLITHIC MICROWAVE INTEGRATED CIRCUITS INCLUDING GALLIUM-NITRIDE DEVICES ON INTRINSIC SEMICONDUCTOR

Abstract:

A number of integrated circuits and methods of manufacturing the integrated circuits are described. An integrated circuit can include different semiconductor devices formed from different semiconductor systems in different regions over the same substrate. The integrated circuit can also include bulk regions of low-loss electrically-insulating material extending through the substrate and located between the different semiconductor regions. Passive RF circuit elements can be formed on the low-loss electrically-insulating material.