Micron Technology, Inc.
Integrated structures, capacitors and methods of forming capacitors

Last updated:

Abstract:

Some embodiments include an integrated structure having a semiconductor base and an insulative frame over the semiconductor base. The insulative frame has vertically-spaced sheets of first insulative material, and pillars of second insulative material between the vertically-spaced sheets. The first and second insulative materials are different from one another. Conductive plates are between the vertically-spaced sheets and are directly against the insulative pillars. Some embodiments include capacitors, and some embodiments include methods of forming capacitors.

Status:
Grant
Type:

Utility

Filling date:

17 Jul 2019

Issue date:

10 Aug 2021