Micron Technology, Inc.
Integrated structures, capacitors and methods of forming capacitors
Last updated:
Abstract:
Some embodiments include an integrated structure having a semiconductor base and an insulative frame over the semiconductor base. The insulative frame has vertically-spaced sheets of first insulative material, and pillars of second insulative material between the vertically-spaced sheets. The first and second insulative materials are different from one another. Conductive plates are between the vertically-spaced sheets and are directly against the insulative pillars. Some embodiments include capacitors, and some embodiments include methods of forming capacitors.
Status:
Grant
Type:
Utility
Filling date:
17 Jul 2019
Issue date:
10 Aug 2021