Micron Technology, Inc.
Reduction of crystal growth resulting from annealing a conductive material
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Abstract:
Systems, apparatuses, and methods related to reduction of crystal growth resulting from annealing a conductive material are described. An example apparatus includes a conductive material selected to have an electrical resistance that is reduced as a result of annealing. A stabilizing material may be formed over a surface of the conductive material. The stabilizing material may be selected to have properties that include stabilization of the reduced electrical resistance of the conductive material and reduction of a degree of freedom of crystal growth relative to the surface resulting from recrystallization of the conductive material during the annealing.
Status:
Grant
Type:
Utility
Filling date:
6 Feb 2019
Issue date:
3 Aug 2021