Micron Technology, Inc.
Via formation for cross-point memory
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Abstract:
Embodiments disclosed herein may relate to electrically conductive vias in cross-point memory array devices. In an embodiment, the vias may be formed using a lithographic operation also utilized to form electrically conductive lines in a first electrode layer of the cross-point memory array device.
Status:
Grant
Type:
Utility
Filling date:
17 Apr 2019
Issue date:
3 Aug 2021