Micron Technology, Inc.
Trench walls, conductive structures having different widths and methods of making same

Abstract:

Embodiments of the disclosure are drawn to apparatuses and methods for trench walls including widened portions and/or conductive structures including constricted portions. The trench walls may include multiple widened portions spaced apart along a length of the trench wall in some examples. Similarly, in some examples, the conductive structures may include multiple constricted portions spaced apart along a length of the conductive structure. In some examples, the dimensions of the widened portions and/or the spacing between the widened portions may be based on properties of the trench wall.