Micron Technology, Inc.
Devices including vertical transistors, and related methods
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Abstract:
A device comprises a first conductive line and a vertical transistor over the first conductive line. The vertical transistor comprises a gate electrode, a gate dielectric material overlying sides of the gate electrode, and a channel region on sides of the gate dielectric material, the gate dielectric material located between the channel region and the gate electrode. The device further comprises a second conductive line overlying a conductive contact of the at least one vertical transistor. Related devices and methods of forming the devices are also disclosed.
Status:
Grant
Type:
Utility
Filling date:
8 Oct 2019
Issue date:
5 Oct 2021