Micron Technology, Inc.
Methods of Utilizing Etch-Stop Material During Fabrication of Capacitors, Integrated Assemblies Comprising Capacitors

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Abstract:

Some embodiments include an integrated assembly having capacitor-contact-regions. Metal-containing interconnects are coupled with the capacitor-contact-regions. A first insulative material is between the metal-containing interconnects. A second insulative material is over the first insulative material. A third insulative material is over the second insulative material. First capacitor electrodes extend through the second and third insulative materials and are coupled with the metal-containing interconnects. Fourth insulative material is adjacent the first capacitor electrodes. Capacitor plate electrodes are adjacent the fourth insulative material and are spaced from the first capacitor electrodes by the fourth insulative material. Some embodiments include methods of forming integrated assemblies.

Status:
Application
Type:

Utility

Filling date:

17 Apr 2020

Issue date:

21 Oct 2021