Micron Technology, Inc.
Ferroelectric Capacitor, A Ferroelectric Memory Cell, An Array Of Ferroelectric Memory Cells, And A Method Of Forming A Ferroelectric Capacitor

Abstract:

A ferroelectric capacitor comprises two conductive capacitor electrodes having ferroelectric material there-between. At least one of the capacitor electrodes comprise M.sub.xSiO.sub.y, where "M" is at least one of Ru, Ti, Ta, Co, Pt, Ir, Os, Mo, V, W, Sr, Re, Rh, Pd, La, Zn, In, Sig, and Nb, Other aspects, including method, are disclosed.