Micron Technology, Inc.
MICROELECTRONIC DEVICES INCLUDING PASSING WORD LINE STRUCTURES, AND RELATED ELECTRONIC SYSTEMS AND METHODS

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Abstract:

A microelectronic device comprises a first pillar of a semiconductive material, a second pillar of the semiconductive material adjacent to the first pillar of the semiconductive material, an active word line extending between the first pillar and the second pillar, and a passing word line extending on a side of the second pillar opposite the active word line, the passing word line extending into an isolation region within the semiconductive material, the isolation region comprising a lower portion and an upper portion having a substantially circular cross-sectional shape and a larger lateral dimension than the lower portion. Related microelectronic devices, electronic systems, and methods are also described.

Status:
Application
Type:

Utility

Filling date:

11 Jun 2020

Issue date:

16 Dec 2021