Micron Technology, Inc.
Semiconductor structures including liners comprising alucone and related methods
Last updated:
Abstract:
A semiconductor device including stacked structures. The stacked structures include at least two chalcogenide materials or alternating dielectric materials and conductive materials. A liner including alucone is formed on sidewalls of the stacked structures. Methods of forming the semiconductor device are also disclosed.
Status:
Grant
Type:
Utility
Filling date:
20 Jun 2019
Issue date:
11 Jan 2022