Micron Technology, Inc.
Semiconductor device release during pick and place operations, and associated systems and methods

Last updated:

Abstract:

Systems and methods for releasing semiconductor devices during pick and place operations are disclosed. A representative system for handling semiconductor dies comprises a support member positioned to carry at least one semiconductor die releasably attached to a support substrate. The system further includes a picking device having a pick head coupleable to a vacuum source and positioned to releasably attach to the semiconductor die at a pick station. The system still further includes a release station having a fluid delivery device coupleable to a source of release fluid, the fluid delivery device having an exit positioned to direct release fluid toward a semiconductor die carried by the support member at the release station.

Status:
Grant
Type:

Utility

Filling date:

25 Jun 2019

Issue date:

25 Jan 2022