Micron Technology, Inc.
APPARATUS AND METHODS FOR ENHANCED MICROELECTRONIC DEVICE HANDLING

Abstract:

This patent application relates to apparatus and methods for enhanced microelectronic device handling. Apparatus comprises a pick arm having a pick surface configured for receiving a microelectronic device thereon, drives for moving the pick arm and reorienting the pick surface in the X, Y and Z planes and about a horizontal rotational axis and a vertical rotational axis, and a sensor device carried by the pick arm and configured to detect at least one of at least one magnitude of force and at least one location of force applied between the pick surface and a structure contacted by the pick surface or a structure and a microelectronic device carried on the pick surface. Related methods are also disclosed.