Micron Technology, Inc.
Device, a Method Used in Forming a Circuit Structure, a Method Used in Forming an Array of Elevationally-Extending Transistors and a Circuit Structure Adjacent Thereto
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Abstract:
A device comprises an array of elevationally-extending transistors and a circuit structure adjacent and electrically coupled to the elevationally-extending transistors of the array. The circuit structure comprises a stair step structure comprising vertically-alternating tiers comprising conductive steps that are at least partially elevationally separated from one another by insulative material. Operative conductive vias individually extend elevationally through one of the conductive steps at least to a bottom of the vertically-alternating tiers and individually electrically couple to an electronic component below the vertically-alternating tiers. Dummy structures individually extend elevationally through one of the conductive steps at least to the bottom of the vertically-alternating tiers. Methods are also disclosed.
Utility
18 Oct 2021
3 Feb 2022