Micron Technology, Inc.
Devices with three-dimensional structures and support elements to increase adhesion to substrates

Last updated:

Abstract:

Methods of forming supports for 3D structures on semiconductor structures comprise forming the supports from photodefinable materials by deposition, selective exposure and curing. Semiconductor dice including 3D structures having associated supports, and semiconductor devices are also disclosed.

Status:
Grant
Type:

Utility

Filling date:

6 Aug 2020

Issue date:

15 Mar 2022