Micron Technology, Inc.
EPITAXIAL SINGLE CRYSTALLINE SILICON GROWTH FOR MEMORY ARRAYS

Abstract:

Systems, methods, and apparatuses are provided for epitaxial single crystalline silicon growth for memory arrays. One example method includes forming logic circuitry on a silicon substrate in a first working surface and depositing an isolation material on the first working surface to encapsulate the logic circuitry and to form a second working surface above the first working surface. Further, the example method includes etching the isolation material to form a vertical opening through the isolation material and epitaxially growing single crystalline silicon from the silicon substrate and horizontally on the second working surface in a first, a second, and a third direction to cover the second working surface. The example method further includes removing a portion of the epitaxially grown single crystalline silicon to partition distinct and separate third working surface areas in which to form memory cell components and forming storage nodes above the memory cell components.