Micron Technology, Inc.
Method and optoelectronic structure providing polysilicon photonic devices with different optical properties in different regions
Last updated:
Abstract:
Method and structural embodiments are described which provide an integrated structure using polysilicon material having different optical properties in different regions of the structure.
Status:
Grant
Type:
Utility
Filling date:
9 Jan 2021
Issue date:
3 May 2022