Micron Technology, Inc.
ELECTRONIC DEVICES COMPRISING AIR GAPS ADJACENT TO BITLINES AND RELATED METHODS AND SYSTEMS
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Abstract:
An electronic device that comprises bitlines and air gaps adjacent to an array region of an electronic device is disclosed. The bitlines comprise sloped sidewalls and a height of the air gaps is greater than a height of the bitlines. Additional electronic devices are disclosed, as are methods of forming an electronic device and related systems.
Status:
Application
Type:
Utility
Filling date:
13 Nov 2020
Issue date:
19 May 2022