Micron Technology, Inc.
Integrated assemblies having anchoring structures proximate stacked memory cells, and methods of forming integrated assemblies

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Abstract:

Some embodiments include an assembly having channel material structures extending upwardly from a conductive structure. Anchor structures are laterally offset from the channel material structures and penetrate into the conductive structure to a depth sufficient to provide mechanical stability to at least a portion of the assembly. The conductive structure may include a first conductive material over a second conductive material, and may be a source line of a three-dimensional NAND configuration. Some embodiments include methods of forming assemblies to have channel material structures and anchor structures.

Status:
Grant
Type:

Utility

Filling date:

17 Dec 2020

Issue date:

31 May 2022