Micron Technology, Inc.
NON-ORTHOGONAL SLOTTED VIAS FOR SEMICONDUCTOR DEVICES AND ASSOCIATED SYSTEMS AND METHODS

Abstract:

Semiconductor devices with slotted vias, and associated systems and methods, are disclosed herein. In one embodiment, a routing region of the semiconductor device includes a set of slotted vias arranged in a non-orthogonal array pattern. Further, patterns of metal lines associated with the set of slotted vias are drawn to align and/or overlap with the slotted vias. As a result, the metal lines may include zig-zag patterns within the routing region. Further, edges of the slotted vias may have a staircase pattern with sets of horizontal and vertical line segments such that a combination of the horizontal and vertical line segments can orient the slotted vias in a non-orthogonal direction.