Micron Technology, Inc.
APPARATUSES AND METHODS FOR CONTROLLING STRUCTURE OF BOTTOM ELECTRODES AND PROVIDING A TOP-SUPPORT THEREOF

Abstract:

An apparatus includes: a substrate; a plurality of pillar-shaped bottom electrodes provided over the substrate; and an upper electrode covering side and top surfaces of the pillar-shaped bottom electrodes with an intervening capacitor insulating film therebetween; wherein the pillar-shaped bottom electrodes have at least an upper portion and a lower portion, and the diameter of the upper portion is smaller than the diameter of the lower portion.