Micron Technology, Inc.
Integrated assemblies, and methods of forming integrated assemblies

Last updated:

Abstract:

Some embodiments include an integrated assembly having a memory array region, a staircase region, and an intervening region between the staircase region and the memory array region. The intervening region includes first and second slabs of insulative material extending through a stack of alternating insulative and conductive levels. Bridging regions are adjacent to the slabs. First slits are along the bridging regions, and second slits extend through the slabs. First panels are within the first slits, and second panels are within the second slits. The second panels are compositionally different from the first panels. Some embodiments include methods of forming integrated assemblies.

Status:
Grant
Type:

Utility

Filling date:

7 Feb 2020

Issue date:

5 Jul 2022