Micron Technology, Inc.
CAPACITORS WITH ELECTRODES HAVING A PORTION OF MATERIAL REMOVED, AND RELATED SEMICONDUCTOR DEVICES, SYSTEMS, AND METHODS

Abstract:

A DRAM capacitor may include a first capacitor electrode, a capacitor dielectric adjacent to the first capacitor electrode, and a second capacitor electrode adjacent to the capacitor dielectric. The first capacitor electrode may include a lower portion, an upper portion, and a step transition between the lower portion and the upper portion, a width of the upper portion of the first capacitor electrode at the step transition is less than a width of the lower portion of the first capacitor electrode at the step transition. Semiconductor devices, systems, and methods are also disclosed.