Micron Technology, Inc.
METHOD AND OPTOELECTRONIC STRUCTURE PROVIDING POLYSILICON PHOTONIC DEVICES WITH DIFFERENT OPTICAL PROPERTIES IN DIFFERENT REGIONS
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Abstract:
Method and structural embodiments are described which provide an integrated structure using polysilicon material having different optical properties in different regions of the structure.
Status:
Application
Type:
Utility
Filling date:
1 Apr 2022
Issue date:
21 Jul 2022