Micron Technology, Inc.
METHOD AND OPTOELECTRONIC STRUCTURE PROVIDING POLYSILICON PHOTONIC DEVICES WITH DIFFERENT OPTICAL PROPERTIES IN DIFFERENT REGIONS

Last updated:

Abstract:

Method and structural embodiments are described which provide an integrated structure using polysilicon material having different optical properties in different regions of the structure.

Status:
Application
Type:

Utility

Filling date:

1 Apr 2022

Issue date:

21 Jul 2022