Micron Technology, Inc.
Methods and apparatus for temperature modification in bonding stacked microelectronic components and related substrates and assemblies
Last updated:
Abstract:
This patent application relates to methods and apparatus for temperature modification within a stack of microelectronic devices for mutual collective bonding of the microelectronic devices, and to related substrates and assemblies.
Status:
Grant
Type:
Utility
Filling date:
17 Mar 2020
Issue date:
9 Aug 2022