Micron Technology, Inc.
Methods and apparatus for temperature modification in bonding stacked microelectronic components and related substrates and assemblies

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Abstract:

This patent application relates to methods and apparatus for temperature modification within a stack of microelectronic devices for mutual collective bonding of the microelectronic devices, and to related substrates and assemblies.

Status:
Grant
Type:

Utility

Filling date:

17 Mar 2020

Issue date:

9 Aug 2022