Micron Technology, Inc.
SEMICONDUCTOR DEVICE HAVING GATE TRENCH

Abstract:

Disclosed herein is a method that includes forming a gate trench in a semiconductor substrate, forming a gate insulating film on an inner wall of the gate trench, forming a gate electrode in the gate trench via the gate insulating film, ashing a top surface of the gate electrode to form a first insulating film, and for a gate cap insulating film embedded in the gate trench to cover the first insulating film.