Micron Technology, Inc.
Arrays of memory cells individually comprising a capacitor and a transistor and methods of forming such arrays
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Abstract:
An array of memory cells individually comprising a capacitor and a transistor comprises, in a first level, alternating columns of digitlines and conductive shield lines. In a second level above the first level there are rows of transistor wordlines. In a third level above the second level there are rows and columns of capacitors. In a fourth level above the third level there are rows of transistor wordlines. In a fifth level above the fourth level there are alternating columns of digitlines and conductive shield lines. Other embodiments and aspects are disclosed, including method.
Status:
Grant
Type:
Utility
Filling date:
26 Aug 2020
Issue date:
29 Jun 2021