Micron Technology, Inc.
Integrated Assemblies Having Voids Along Regions of Gates, and Methods of Forming Conductive Structures

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Abstract:

Some embodiments include an integrated assembly with a semiconductor-material-structure having a first source/drain region, a second source/drain region, and a channel region between the first and second source/drain regions. The semiconductor-material-structure has a first side and an opposing second side. A first conductive structure is adjacent to the first side and is operatively proximate the channel region to gatedly control coupling of the first and second source/drain regions through the channel region. A second conductive structure is adjacent to the second side and is spaced from the second side by an intervening region which includes a void. Some embodiments include methods of forming integrated assemblies.

Status:
Application
Type:

Utility

Filling date:

26 Dec 2019

Issue date:

1 Jul 2021