Micron Technology, Inc.
Transistors, Arrays Of Transistors, Arrays Of Memory Cells Individually Comprising A Capacitor And An Elevationally-Extending Transistor, And Methods Of Forming An Array Of Transistors
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Abstract:
A transistor comprises semiconductor material that is generally L-shaped or generally mirror L-shaped in at least one straight-line vertical cross-section thereby having an elevationally-extending stem and a base extending horizontally from a lateral side of the stem above a bottom of the stem. The semiconductor material of the stem comprises an upper source/drain region and a channel region there-below. The transistor comprises at least one of (a) and (b), where (a): the semiconductor material of the stem comprises a lower source/drain region below the channel region, and (b): the semiconductor material of the base comprises a lower source/drain region. A gate is operatively laterally adjacent the channel region of the stem. Other embodiments are disclosed, including arrays of memory cells individually comprising a capacitor and an elevationally-extending transistor. Methods are disclosed.
Utility
9 Feb 2021
17 Jun 2021