Nordson Corporation
X-ray inspection apparatus for inspecting semiconductor wafers

Abstract:

An x-ray inspection system includes an x-ray source, a sample support for supporting a sample to be inspected, where the sample support includes a support surface extending in a horizontal plane, an x-ray detector, and a sample support positioning assembly for positioning the sample support relative to the x-ray source or x-ray detector. The sample positioning assembly includes a vertical positioning mechanism for moving the sample support in a vertical direction, orthogonal to the horizontal plane, and a first horizontal positioning mechanism for moving both the sample support and the vertical positioning mechanism in a first horizontal direction. This arrangement allows for accurate movement of the sample to different imaging positions in the horizontal plane and a low power vertical positioning mechanism to be used.