NeoPhotonics Corporation
METHOD AND APPARATUS FOR PHASE-MATCHED OPTICAL AND RF WAVE PROPAGATIONS FOR SEMICONDUCTOR-BASED MZM MODULATORS

Abstract:

Optical modulators with semiconductor based optical waveguides interacting with an RF waveguide in a traveling wave structure. The semiconductor optical waveguide generally comprise a p-n junction along the waveguide. To reduce the phase walk-off between the optical signal and the RF signal, the traveling wave structure can comprise one or more compensation sections where the phase walk-off is reversed. The compensation sections can comprise a change in dopant concentrations, extra length for the optical waveguide and/or extra length for the RF waveguide. Corresponding methods are described.