Universal Display Corporation
Nozzle exit contours for pattern composition
Last updated:
Abstract:
A deposition nozzle is provided that includes offset deposition apertures disposed between exhaust apertures on either side of the deposition apertures. The provided nozzle arrangements allow for deposition of material with a deposition profile suitable for use in devices such as OLEDs.
Status:
Grant
Type:
Utility
Filling date:
31 Mar 2017
Issue date:
9 Nov 2021