Universal Display Corporation
Nozzle exit contours for pattern composition

Last updated:

Abstract:

A deposition nozzle is provided that includes offset deposition apertures disposed between exhaust apertures on either side of the deposition apertures. The provided nozzle arrangements allow for deposition of material with a deposition profile suitable for use in devices such as OLEDs.

Status:
Grant
Type:

Utility

Filling date:

31 Mar 2017

Issue date:

9 Nov 2021