Universal Display Corporation
Sequential material sources for thermally challenged OLED materials
Last updated:
Abstract:
Systems and techniques for deposition such as via OVJP using multiple source ampules are provided. The source ampules are arranged and controlled such that carrier gas may be fed through each source ampule sequentially, thereby allowing for more continuous operation and use of materials that otherwise would be subject to thermal degradation.
Status:
Application
Type:
Utility
Filling date:
3 Jun 2019
Issue date:
19 Dec 2019