POSCO Holdings Inc.
APPARATUS AND METHOD FOR CONTROLLING COATING LAYER IN PVD PLATING PROCESS

Abstract:

Provided is an apparatus for controlling a coating layer in a physical vapor deposition (PVD) plating process that forms a coating layer on a steel sheet with metal vapor by PVD. The apparatus for controlling a coating layer comprises: a crucible into which a molten material is introduced; an electromagnetic induction coil disposed around the outer periphery of the crucible to heat the molten material introduced into the crucible and form a molten metal to generate metal vapor from the molten metal; a power supply unit for supplying an electric current to the electromagnetic induction coil; and a control unit for measuring the impedance of the electromagnetic induction coil and controlling the electric current supplied to the electromagnetic induction coil so that the impedance is kept constant according to the molten material which is introduced into the crucible at a constant feed rate.