Photronics, Inc.
Pellicle for flat panel display photomask
Last updated:
Abstract:
A pellicle assembly for large-size photomasks including a frame member configured to be affixed to a large-size photomask substrate, a substantially rigid and transparent pellicle membrane affixed to the frame member so as to protect at least a portion of the large-size photomask substrate from contamination during usage, storage and/or transport, and a coating on at least one of top and bottom surfaces of the pellicle membrane that binds the pellicle membrane to prevent separation of pellicle membrane material in the event of breakage.
Status:
Grant
Type:
Utility
Filling date:
12 Sep 2019
Issue date:
14 Sep 2021