Photronics, Inc.
Pellicle removal tool
Last updated:
Abstract:
A pellicle removal tool including a stage that holds a photomask and an associated pellicle, two or more arms positioned around the stage and configured to engage pellicle side wells of the pellicle, and two or more actuators each configured to adjust at least a vertical position of a corresponding one of the two or more arms so as to apply a lifting force to the pellicle for removal of the pellicle from the photomask.
Status:
Grant
Type:
Utility
Filling date:
24 Apr 2018
Issue date:
23 Nov 2021