QUALCOMM Incorporated
BACK-END-OF-LINE (BEOL) SIDEWALL METAL-INSULATOR-METAL (MIM) CAPACITOR

Abstract:

An integrated circuit (IC) is described. The IC includes a substrate and a plurality of back-end-of-line (BEOL) layers on the substrate. The IC also includes a trench having tapered sidewalls and a base in a BEOL layer of the plurality of BEOL layers on the substrate. The IC further includes a metal-insulator-metal (MIM) capacitor on the tapered sidewalls and the base of the trench in the BEOL layer. The MIM capacitor includes a first conductive layer to line the tapered sidewalls and the base of the trench. The MIM capacitor also includes a dielectric layer to line the first conductive layer on the tapered sidewalls and the base of the trench. The MIM capacitor further includes a second conductive layer on the dielectric layer and filling the trench in the BEOL layer.