QUALCOMM Incorporated
HYBRID THREE DIMENSIONAL INDUCTOR

Abstract:

An improved filter for high frequency, such as 5G wireless communication, may include inductor-Q improvement and reduced die-size with a hybrid 3D-inductor integration. In some examples, the inductors may be formed using an IPD and a fan-out package. For instance, a first multilayer substrate comprises a plurality of metal insulator metal (MIM) capacitors formed using various layers (e.g., M1 and M2) and a first portion of the 3D inductors, and a second multilayer substrate comprises at least a second portion of the 3D inductors. The 3D inductors may be electrically coupled to the MIM capacitors to form at least one filter network.