QUALCOMM Incorporated
STRAINED SILICON TRANSISTOR

Abstract:

Strained silicon transistor, such as GAA transistors, allow for both good PMOS mobility and NMOS mobility on the same substrate. In one example, a GAA circuit may include a NMOS device on a tensile strained Si channel and a PMOS device on a compressive strained SiGe channel. In another example, a GAA circuit may include a NMOS device on a strained Si channel and a PMOS device on a relaxed SiGe channel on (110) crystalline substrate.