QUALCOMM Incorporated
CAPACITOR INTERPOSER LAYER (CIL) IN A DIE-TO-WAFER THREE-DIMENSIONAL (3D) INTEGRATED CIRCUIT (IC) (3DIC)

Abstract:

A capacitor interposer layer (CIL) in a die-to-wafer three dimensional integrated circuit (3DIC) and methods of forming the same are disclosed. A CIL is formed in a wafer under a powder distribution network (PDN) die area of a chip. Electrical connections between the wafer and the chip are formed using a copper-to-copper bond. This placement allows the capacitor to be close to the PDN die area within the chip to reduce equivalent series resistance (ESR) and equivalent series inductance (ESL), while permitting a relatively low profile device with reduced PDN voltage droop.