QUALCOMM Incorporated
Multi-dielectric structure in two-layer embedded trace substrate

Abstract:

Certain aspects of the present disclosure generally relate to an embedded trace substrate having at least two different dielectric layers with different dielectric materials and methods for fabricating the same. One example embedded trace substrate generally includes a first metal layer; a first dielectric layer disposed below the first metal layer and comprising a first dielectric material; a second dielectric layer disposed below the first dielectric layer and comprising a second dielectric material, wherein the second dielectric material of the second dielectric layer is stiffer than the first dielectric material of the first dielectric layer; and a second metal layer disposed below the second dielectric layer.