QUALCOMM Incorporated
TRANSISTOR SOURCE/DRAIN EPITAXY BLOCKER
Last updated:
Abstract:
A transistor cell height may be scaled down without producing undesirable degradation with the use of an isolation structure between adjacent fins of a transistor cell. The transistor cell includes a substrate, a first fin and a second fin located on the substrate, and an isolation structure located on the substrate between the first fin and the second fin.
Status:
Application
Type:
Utility
Filling date:
2 Mar 2021
Issue date:
8 Sep 2022