Quantum-Si incorporated
SURFACE MODIFICATION IN THE VAPOR PHASE
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Abstract:
Aspects of the application provide methods of producing substrates having modified surfaces. In some aspects, methods of surface modification involve treating a surface of a substrate with an organic reagent in vapor phase to form an organic layer over the surface. In some aspects, methods of forming a stable surface coating on an oxidized surface are provided.
Status:
Application
Type:
Utility
Filling date:
9 Oct 2020
Issue date:
6 May 2021